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Updated: May 17, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
N Saowadee1, K Agersted, H S Ubhi
1Department of Energy Conversion and Storage, Technical University of Denmark, Risø Campus, Frederiksborgvej, 4000 Roskilde, Denmark.
Focused ion beam milling for 3D-EBSD can damage surfaces, reducing data quality. This study introduces a low kV polishing method that improves EBSD signal quality with minimal impact on acquisition time.
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