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Updated: May 17, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Ion beam polishing for three-dimensional electron backscattered diffraction.

N Saowadee1, K Agersted, H S Ubhi

  • 1Department of Energy Conversion and Storage, Technical University of Denmark, Risø Campus, Frederiksborgvej, 4000 Roskilde, Denmark.

Journal of Microscopy
|November 7, 2012
PubMed
Summary
This summary is machine-generated.

Focused ion beam milling for 3D-EBSD can damage surfaces, reducing data quality. This study introduces a low kV polishing method that improves EBSD signal quality with minimal impact on acquisition time.

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Last Updated: May 17, 2026

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Area of Science:

  • Materials Science
  • Electron Microscopy
  • Surface Science

Background:

  • Focused ion beam (FIB) serial sectioning for 3D-EBSD can cause surface damage and amorphization.
  • This damage degrades Electron Backscatter Diffraction (EBSD) signal quality, leading to longer acquisition times or poorer data.
  • La- and Nb-doped strontium titanate are materials susceptible to such surface alterations.

Purpose of the Study:

  • To develop and implement an automated low kV focused ion beam polishing technique.
  • To mitigate surface damage and amorphization during 3D-EBSD.
  • To improve EBSD signal quality and data acquisition efficiency for doped strontium titanate.

Main Methods:

  • Utilized a low kV focused ion beam with a defocused, high-current ion beam and line scan milling.
  • Applied automated polishing during serial sectioning of 12.6 × 12.6 × 3.0 μm volumes.
  • Integrated 1 minute of polishing per slice into the 3D-EBSD workflow.

Main Results:

  • Successfully polished surfaces during 3D-EBSD, reducing damage and amorphization.
  • Achieved a significant increase in indexing percentage and EBSD pattern quality.
  • Increased total acquisition time by only approximately 3.3% compared to standard 3D-EBSD mapping.

Conclusions:

  • Low kV focused ion beam polishing is an effective method to improve 3D-EBSD data quality.
  • This technique enhances signal quality with a minimal increase in data acquisition time.
  • Further improvements to the polishing process are discussed, with two potential methods identified.