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Updated: May 17, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Absolute determination of charge-coupled device quantum detection efficiency using Si K-edge x-ray absorption fine
1Lawrence Livermore National Laboratory, P.O. Box 808, Livermore, California 94550, USA. dunn6@llnl.gov
This study introduces a novel method to precisely determine the quantum detection efficiency and layer thicknesses in front-illuminated charge-coupled devices (CCDs). This technique enhances X-ray spectroscopy accuracy for laser-produced plasma research.
Area of Science:
- Physics
- Materials Science
- Spectroscopy
Background:
- Front-illuminated charge-coupled devices (CCDs) are crucial for X-ray detection.
- Accurate characterization of CCDs, including quantum detection efficiency and absorbing layers, is essential for reliable spectral analysis.
- Laser-produced plasmas generate intense X-ray emissions requiring precise measurement tools.
Purpose of the Study:
- To develop and present a method for determining the quantum detection efficiency and absorbing layer thicknesses of a front-illuminated CCD.
- To analyze the X-ray absorption fine structure and K-edge discontinuity in a CCD used in a crystal spectrometer.
- To establish a precise detection model for CCDs operating in the 0.2 to 10 keV energy range.
Main Methods:
- Utilizing a front-illuminated CCD as part of a crystal spectrometer to measure X-ray emission from laser-produced plasmas.
- Spectrally resolving the Si K-edge X-ray absorption fine structure influenced by the CCD's electrode structure.
- Analyzing the discontinuity and oscillations in the CCD response across the Si K-edge to identify individual material layers (Si, SiO2, Si3N4).
Main Results:
- Successfully identified and characterized absorption features from Si, SiO2, and Si3N4 layers within the CCD.
- Precisely determined the active layer thickness and the thicknesses of various absorbing layers through spectral analysis of the K-edge discontinuity and fine structure.
- Demonstrated the capability to deduce a precise CCD detection model from 0.2 to 10 keV.
Conclusions:
- The developed method provides a highly sensitive technique for precise characterization of CCDs.
- Accurate determination of layer thicknesses and quantum detection efficiency is achievable using X-ray absorption fine structure analysis.
- This technique significantly improves the reliability of X-ray spectroscopy for applications involving laser-produced plasmas and other intense X-ray sources.
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