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Updated: May 17, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics

Published on: August 5, 2020

Acoustically coupled thickness-mode AIN-on-Si band-pass filters--part I: principle and devices

Wanling Pan1, Vikram A Thakar, Mina Rais-Zadeh

  • 1Georgia Institute of Technology, Atlanta, GA, USA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|November 13, 2012
PubMed

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