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Acoustically coupled thickness-mode AIN-on-Si band-pass filters--part II: simulation and analysis

Vikram A Thakar1, Wanling Pan, Farrokh Ayazi

  • 1Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, MI, USA. thakar@umich.edu

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|November 13, 2012
PubMed

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