Design, implementation, and application of a microresonator platform for measuring energy dissipation by internal...

Accurate measurements of internal friction in nanowires are required for the rational design of high-Q resonators used in nanoelectromechanical systems and for fundamental studies of nanomechanical behavior. However, measuring internal friction is challenging because of the difficulties associated with identifying the contributions of material dissipation to structural damping. Here, we present an approach for overcoming these difficulties by using a composite microresonator platform that is calibrated against the ultimate limits of thermoelastic damping. The platform consists of an array of nanowires patterned at the root of a low-loss single-crystal silicon microcantilever. The structure is processed using a lift-off technique, implemented using electron-beam lithography, to achieve excellent control over the size, alignment, dispersion and location of the nanowire array. As the first application of this platform, we measured internal friction at room temperature in aluminum nanowires that ranged from 50 to 100 nm in thickness and 100 to 400 nm in width. Internal friction is ~0.03 at frequencies of 6.5-21 kHz. Transmission electron microscopy of the nanocrystalline grain structure, and comparison with previously measured values of internal friction in continuous thin films of aluminum, suggest that grain-boundary sliding is a major source of internal friction in these nanowires.