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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
H A Tahini1, A Chroneos, R W Grimes
1Department of Materials, Imperial College London, London SW7 2AZ, UK. hassan.tahini09@imperial.ac.uk
Phosphorous diffusion in germanium is rapid. Codoping with tin and hafnium, particularly hafnium, effectively reduces phosphorous migration by increasing energy barriers, aiding technological applications.
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