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Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
Point defect engineering strategies to retard phosphorous diffusion in germanium
H A Tahini1, A Chroneos, R W Grimes
1Department of Materials, Imperial College London, London SW7 2AZ, UK. hassan.tahini09@imperial.ac.uk
Physical Chemistry Chemical Physics : PCCP
|November 22, 2012
Summary
Phosphorous diffusion in germanium is rapid. Codoping with tin and hafnium, particularly hafnium, effectively reduces phosphorous migration by increasing energy barriers, aiding technological applications.
Area of Science:
- Materials Science
- Solid-State Physics
- Computational Materials Science
Background:
- Phosphorous diffusion in germanium (Ge) is notably fast, posing challenges for semiconductor device fabrication and performance.
- Point defect engineering is crucial for controlling impurity diffusion and enabling technological applications.
Purpose of the Study:
- To investigate the impact of isovalent codopants, specifically tin (Sn) and hafnium (Hf), on phosphorous (P) migration in germanium.
- To explore the mechanisms of vacancy-mediated diffusion and the role of codopants in altering migration energy barriers.
Main Methods:
- Utilizing Density Functional Theory (DFT) calculations.
- Employing hybrid Density Functional calculations for enhanced accuracy.
- Simulating vacancy-mediated diffusion pathways for phosphorous in germanium.
Main Results:
- The migration energy barriers for phosphorous in germanium are significantly increased by the presence of oversized isovalent codopants like tin and hafnium.
- Oversized codopants effectively hinder the movement of phosphorous atoms through vacancy-mediated diffusion.
Conclusions:
- Tin and hafnium codoping are proposed as effective point defect engineering strategies to retard phosphorous migration in germanium.
- Hafnium codoping shows particular promise in significantly reducing phosphorous diffusion rates for advanced germanium-based technologies.
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