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Updated: May 16, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A scheme for lensless X-ray microscopy combining coherent diffraction imaging and differential corner holography
F Capotondi1, E Pedersoli, M Kiskinova
1Fermi, Elettra Sincrotrone Trieste, SS 14 - km 163.5, 34149 Basovizza, Trieste, Italy. flavio.capotondi@elettra.trieste.it
Researchers used silicon nitride window corners in lensless X-ray microscopy as references for differential holography. This method, combined with iterative phasing, achieved high-resolution object reconstruction near 85 nm.
Area of Science:
- X-ray microscopy
- Holography
- Diffraction imaging
Background:
- Lensless X-ray microscopy often requires external references for accurate object reconstruction.
- Differential holography typically uses localized reference points, limiting its application.
- Coherent diffraction imaging (CDI) faces challenges with missing data and resolution enhancement.
Purpose of the Study:
- To develop a novel approach for obtaining real-space holograms in lensless X-ray microscopy.
- To enhance the spatial resolution of reconstructed objects using existing microscopy hardware.
- To overcome data limitations caused by beam stops in X-ray imaging.
Main Methods:
- Utilizing the corners of silicon nitride supporting windows as extended references in differential holography.
- Integrating differential holography with iterative phasing techniques from coherent diffraction imaging.
- Applying these combined methods to lensless X-ray microscopy experiments.
Main Results:
- Successfully obtained real-space holograms of illuminated objects using window corners as references.
- Achieved enhanced spatial resolution in the reconstructed object, approaching 85 nm.
- Overcame issues of missing data caused by beam stops, improving the completeness of reconstructions.
Conclusions:
- The corners of silicon nitride windows serve as effective extended references for differential holography in lensless X-ray microscopy.
- Combining differential holography with iterative phasing significantly improves spatial resolution and data recovery.
- This integrated approach offers a practical and cost-effective method for high-resolution X-ray imaging.
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