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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Optical characterization of fully programmable MEMS diffraction gratings.

F Zamkotsian1, B Timotijevic, R Lockhart

  • 1Laboratoire d’Astrophysique de Marseille- LAM, Université Aix-Marseille & CNRS, UMR7326, 38 rue Frederic Joliot-Curie, 13388, Marseille Cedex 13, France. frederic.zamkotsian@oamp.fr

Optics Express
|November 29, 2012
PubMed
Summary
This summary is machine-generated.

We developed programmable diffraction gratings using 64 silicon micro-mirrors. These advanced gratings function as adaptable light modulators and spectra generators for optical applications.

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Area of Science:

  • Micro-optics and photonics engineering.

Background:

  • Diffraction gratings are crucial optical components.
  • Programmable gratings offer enhanced control over light manipulation.

Purpose of the Study:

  • To fabricate and characterize novel, fully programmable diffraction gratings.
  • To evaluate the performance of silicon micro-mirror based gratings for optical modulation and spectral generation.

Main Methods:

  • Fabrication of 64 electrostatically actuated silicon micro-mirrors (700µm x 50µm, 90% fill factor).
  • Characterization of micro-mirror actuation, including displacement (1.25µm), cross-talk, and bowing (0.14µm).
  • Measurement of grating performance, including extinction ratio and operational wavelength ranges.

Main Results:

  • Achieved high extinction ratios up to 100 by adjusting adjacent micro-mirrors.
  • Demonstrated negligible cross-talk and minimal bowing (<0.14µm) over the 700µm mirror length.
  • Confirmed functionality as light modulators up to 5µm and spectra generators up to 2.5µm.

Conclusions:

  • The developed silicon micro-mirror diffraction gratings are fully programmable and highly effective.
  • These gratings offer versatile applications in light modulation and spectral generation.
  • The precise control and performance metrics indicate significant potential for advanced optical systems.