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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Surface acoustic load sensing using a face-shear PIN-PMN-PT single-crystal resonator
Kyungrim Kim1, Shujun Zhang, Xiaoning Jiang
1Department of Mechanical and Aerospace Engineering, North Carolina State University, Raleigh, NC, USA.
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|November 30, 2012
Summary
This study presents lead indium niobate-lead magnesium niobate-lead titanate (PIN-PMN-PT) resonators for acoustic load sensing. Face-shear mode resonators show significantly higher sensitivity to surface acoustic loads, promising for advanced sensor applications.
Area of Science:
- Materials Science
- Acoustics
- Sensor Technology
Background:
- Lead indium niobate-lead magnesium niobate-lead titanate (PIN-PMN-PT) single crystals are piezoelectric materials with potential for sensor applications.
- Surface acoustic wave (SAW) sensors are sensitive to changes in the acoustic load on their surface.
Purpose of the Study:
- To investigate the sensitivity of different PIN-PMN-PT resonator modes to surface acoustic loads.
- To evaluate the potential of face-shear mode resonators for high-sensitivity acoustic sensing.
Main Methods:
- Fabrication and characterization of PIN-PMN-PT resonators in thickness mode, thickness-shear mode, and face-shear mode.
- Application of varying acoustic loads to the resonators and measurement of electrical impedance spectra.
- Utilizing the Krimholtz, Leedom, and Matthaei (KLM) model to analyze surface acoustic loading effects.
Main Results:
- Face-shear mode PIN-PMN-PT resonators exhibited over one order of magnitude higher sensitivity to surface acoustic loads compared to other modes.
- The electrical impedance spectra of face-shear resonators were significantly affected by surface acoustic loading.
- The KLM model successfully verified the observed surface acoustic loading effects.
Conclusions:
- Face-shear mode PIN-PMN-PT resonators offer superior sensitivity for surface acoustic load sensing.
- These high-sensitivity resonators are promising for applications such as artificial skin, biosensors, and touch screens.
