Novel air flow meter for an automobile engine using a Si sensor with porous Si thermal isolation

An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor is mounted on one side of a printed circuit board (PCB), on the other side of which the readout and control electronics of the meter are mounted. The PCB is fixed on a housing containing a semi-cylindrical flow tube, in the middle of which the sensor is situated. An important advantage of the present air flow meter is that it detects with equal sensitivity both forward and reverse flows. Two prototypes were fabricated, a laboratory prototype for flow calibration using mass flow controllers and a final demonstrator with the housing mounted in an automobile engine inlet tube. The final demonstrator was tested in real life conditions in the engine inlet tube of a truck. It shows an almost linear response in a large flow range between –6,500 kg/h and +6,500 kg/h, which is an order of magnitude larger than the ones usually encountered in an automobile engine.