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Updated: May 16, 2026

Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
Published on: April 4, 2017
Silicon-on-insulator chip-to-chip coupling via out-of-plane or vertical grating couplers
Miguel Cabezón1, Ignacio Garcés, Asier Villafranca
1Photonics Technology Group at I3A, Edificio I+D+i, C/Mariano Esquillor s/n, Universidad de Zaragoza, Zaragoza 50018, Spain. mcabezon@unizar.es
Abstract:
In this work, we study the possibility of chip-to-chip interconnections via out-of-plane grating couplers or vertical grating couplers (VGCs) fabricated on silicon-on-insulator (SOI) technology. Mathematical and experimental results for the efficiency of coupling light between two such grating couplers have been presented. The VGCs are placed vertically against each other in order to study the effect of spatial misalignments on the light coupling efficiency. Waveguides and VGCs are designed according to standard SOI fabrication processes. A two-dimensional finite-difference time-domain method is used for the simulations. Measurements are performed on different combinations of 4 samples on the chip. Light coupling efficiency of -8 dB is achieved and tolerances to misalignments in 3 spatial dimensions are provided.
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