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Updated: May 16, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
A double B1-mode 4-layer laminated piezoelectric linear motor
Xiaotian Li1, Zhijiang Chen, Shuxiang Dong
1Materials Science & Engineering Department, College of Engineering, Peking University, Beijing, China.
A miniature ultrasonic linear motor utilizing four lead zirconate titanate (PZT) layers achieves low-voltage operation. This novel piezoelectric motor generates a significant driving force and high speed, offering efficient linear motion for micro-devices.
Area of Science:
- Materials Science and Engineering
- Mechanical Engineering
- Electrical Engineering
Background:
- Miniature linear motors are crucial for micro-actuation in various applications.
- Traditional piezoelectric motors often require high driving voltages, limiting their use.
- Developing efficient, low-voltage piezoelectric motors is an ongoing research challenge.
Purpose of the Study:
- To design and fabricate a miniature piezoelectric ultrasonic linear motor.
- To investigate the performance of a novel 4-layer lead zirconate titanate (PZT) laminate.
- To achieve low-voltage operation and high driving force in a compact piezoelectric motor.
Main Methods:
- Fabrication of a 4-layer PZT piezoelectric ceramic laminate.
- Utilizing two orthogonal first-bending modes to generate elliptical oscillations.
- Driving a contacting slider for continuous linear motion at resonance frequency.
- Experimental characterization of driving force, linear speed, and efficiency.
Main Results:
- The miniature linear motor (4 × 4 × 12 mm, 1.7 g) demonstrated a large driving force of 0.48 N.
- Achieved a maximum linear motion speed of 160 mm/s at a low drive voltage (40 V(pp)/mm).
- The motor operated at a resonance frequency of 64.5 kHz with a maximum efficiency of 30%.
Conclusions:
- The developed 4-layer PZT piezoelectric motor offers a promising solution for low-voltage, high-performance micro-actuation.
- The design effectively converts piezoelectric bending modes into efficient linear motion.
- This miniature motor has potential applications in micro-robotics, precision positioning, and portable electronic devices.
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