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Comparison study of algorithms and accuracy in the wavelength scanning interferometry
Hussam Muhamedsalih1, Feng Gao, Xiangqian Jiang
1Centre for Precision Technologies, University of Huddersfield, Huddersfield, UK.
Applied Optics
|December 25, 2012
Summary
Wavelength scanning interferometry (WSI) enables surface measurement without mechanical scanning. Algorithm choice significantly impacts measurement accuracy, ranging from micrometers to nanometers for discontinuous profiles.
Area of Science:
- Optics and Photonics
- Metrology
- Surface Science
Background:
- Wavelength scanning interferometry (WSI) is a technique for surface profiling.
- It allows for phase shift generation without mechanical scanning, suitable for discontinuous surfaces.
- Algorithm selection is critical for balancing accuracy and computational speed in WSI data analysis.
Purpose of the Study:
- To compare the performance of four distinct algorithms for analyzing interference fringe patterns in WSI.
- To evaluate the mathematical descriptions, computing resolution, and speed of each algorithm.
- To assess the impact of different algorithms on the accuracy of surface height measurements.
Main Methods:
- Implementation and mathematical description of four WSI fringe analysis algorithms.
- Performance evaluation based on computing resolution and speed.
- Experimental measurement of two step-height samples using WSI.
Main Results:
- The study presents a comparative analysis of four WSI fringe analysis algorithms.
- Algorithm performance regarding computing resolution and speed is detailed.
- Experimental data shows that the choice of algorithm influences surface height accuracy, with results varying from micrometer to nanometer precision.
Conclusions:
- The accuracy of WSI surface height measurements is algorithm-dependent.
- Algorithm selection in WSI analysis directly impacts the achievable precision, from micrometers down to nanometers.
- This comparison provides valuable insights for optimizing WSI for specific surface metrology applications.
