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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Analytical study on arbitrary waveform generation by MEMS micro mirror arrays
Salih K Kalyoncu1, Yuewang Huang, Qi Song
1EECS Department, University of California, Irvine, CA 92697, USA.
Optics Express
|December 25, 2012
Summary
Researchers developed a new arbitrary waveform generation technique using MEMS micro-mirror arrays. This method achieves high repetition rates and fast rise times for advanced signal generation.
Area of Science:
- Optical Engineering
- Microelectromechanical Systems (MEMS)
Background:
- Arbitrary waveform generation is crucial for advanced signal processing and testing.
- Existing techniques face limitations in speed, modulation, and waveform fidelity.
Purpose of the Study:
- To present an analytical model and procedure for a novel arbitrary waveform generation technique.
- To evaluate the performance metrics of this new system, including temporal resolution, repetition rate, modulation index, and rise/fall times.
Main Methods:
- Utilized MEMS digital micro-mirror arrays for spatial light modulation.
- Analyzed the system by reducing diffraction limits through beam size and focal length optimization.
- Achieved fine spatial modulation down to the single mirror pitch size (10.8μm).
Main Results:
- Demonstrated the potential for waveforms with repetition rates up to 18GHz.
- Achieved a modulation index exceeding 90% and rise times under 100 picoseconds.
- Experimental validation showed good agreement with theoretical calculations for 120MHz square waves and 160MHz sawtooth waves.
Conclusions:
- The proposed MEMS-based arbitrary waveform generation technique offers significant improvements in performance.
- Optimizing optical parameters and spatial modulation enables high-speed, high-fidelity waveform generation.
- This technology holds promise for applications requiring precise and rapid signal synthesis.

