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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Analytical study on arbitrary waveform generation by MEMS micro mirror arrays.

Salih K Kalyoncu¹, Yuewang Huang, Qi Song

¹EECS Department, University of California, Irvine, CA 92697, USA.

|December 25, 2012

Summary

Researchers developed a new arbitrary waveform generation technique using MEMS micro-mirror arrays. This method achieves high repetition rates and fast rise times for advanced signal generation.

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Last Updated: May 15, 2026

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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Area of Science:

Optical Engineering
Microelectromechanical Systems (MEMS)

Background:

Arbitrary waveform generation is crucial for advanced signal processing and testing.
Existing techniques face limitations in speed, modulation, and waveform fidelity.

Purpose of the Study:

To present an analytical model and procedure for a novel arbitrary waveform generation technique.
To evaluate the performance metrics of this new system, including temporal resolution, repetition rate, modulation index, and rise/fall times.

Main Methods:

Utilized MEMS digital micro-mirror arrays for spatial light modulation.
Analyzed the system by reducing diffraction limits through beam size and focal length optimization.
Achieved fine spatial modulation down to the single mirror pitch size (10.8μm).

Main Results:

Demonstrated the potential for waveforms with repetition rates up to 18GHz.
Achieved a modulation index exceeding 90% and rise times under 100 picoseconds.
Experimental validation showed good agreement with theoretical calculations for 120MHz square waves and 160MHz sawtooth waves.

Conclusions:

The proposed MEMS-based arbitrary waveform generation technique offers significant improvements in performance.
Optimizing optical parameters and spatial modulation enables high-speed, high-fidelity waveform generation.
This technology holds promise for applications requiring precise and rapid signal synthesis.