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Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
High-quality LiNbO3 microdisk resonators by undercut etching and surface tension reshaping.
Tzyy-Jiann Wang1, Jheng-Yu He, Cheng-An Lee
1Institute of Electro-Optical Engineering, National Taipei University of Technology, No.1, Sec. 3, Chung-Hsiao E. Road, Taipei 10608, Taiwan. f10939@ntut.edu.tw
Optics Express
|December 25, 2012
Summary
Ultra-smooth lithium niobate (LiNbO3) microdisk resonators were fabricated using ion implantation and etching. These resonators exhibit excellent optical properties, paving the way for advanced photonic devices.
Area of Science:
- Materials Science
- Photonics
- Nanotechnology
Background:
- Lithium niobate (LiNbO3) is a key material for integrated optics due to its electro-optic and nonlinear-optic properties.
- Fabricating high-quality microdisk resonators in LiNbO3 is challenging due to material properties and fabrication complexities.
Purpose of the Study:
- To develop a method for fabricating ultra-smooth LiNbO3 microdisk resonators.
- To characterize the optical performance of the fabricated microdisk resonators.
- To explore potential applications of these resonators in integrated photonics.
Main Methods:
- Selective ion implantation to create a buried damage layer.
- Chemical etching to form the undercut microdisk structure.
- Thermal treatment to smooth and reshape the microdisk surface.
Main Results:
- Achieved ultra-smooth LiNbO3 microdisk resonators.
- Demonstrated resonant characteristics consistent with finite element method simulations.
- A 20μm-diameter resonator exhibited a Free Spectral Range (FSR) of 16.43nm and a Quality factor (Q factor) of 2.60 × 10^4.
Conclusions:
- The developed fabrication technique yields high-performance LiNbO3 microdisk resonators.
- These resonators are suitable for applications leveraging LiNbO3's electro-optic and nonlinear-optic effects.
- This work contributes to the advancement of integrated photonic devices.
