Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis

J Jansen1, M T Otten, H W Zandbergen

  • 1National Centre for HREM, Kavli Institute of Nano Science, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands. j.jansen@tudelft.nl

Ultramicroscopy
|January 1, 2013
PubMed
Summary

This study introduces a new electron microscopy technique for precisely measuring crystalline material mis-tilt. The method achieves 0.02-degree accuracy, significantly improving upon existing specimen-stage tilt methods.