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Atomic Force Microscopy

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Related Experiment Video

Updated: May 15, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy

Picometer-Precision Atomic Position Tracking through Electron Microscopy

Published on: July 3, 2021

Advance in multi-hit detection and quantization in atom probe tomography.

G Da Costa¹, H Wang, S Duguay

¹Groupe de Physique des Matériaux - UMR 6634 CNRS - Université et INSA de Rouen, 76801 Saint-Etienne du Rouvray Cedex, France.

The Review of Scientific Instruments

|January 3, 2013

Summary

Preferential retention of high evaporation field species in atom-probe tomography causes inaccurate concentration measurements. A new Fourier space signal processing method improves detector capabilities, enabling accurate chemical composition quantification, especially for boron in silicon samples.

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Last Updated: May 15, 2026

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Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

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Atom Probe Tomography Analysis of Exsolved Mineral Phases

Atom Probe Tomography Analysis of Exsolved Mineral Phases

Published on: October 25, 2019

Area of Science:

Materials Science
Analytical Chemistry
Surface Science

Background:

Preferential retention of high evaporation field species at sample surfaces in atom-probe tomography (APT) leads to pile-up effects.
These pile-up effects compromise the accuracy of concentration measurements in 3D APT.
Underestimation of high-field species concentrations is a significant issue in current APT analyses.

Purpose of the Study:

To address the challenge of inaccurate concentration measurements in APT caused by pile-up effects.
To enhance the reliability of chemical composition quantification in materials analysis.
To improve the detection and positioning capabilities of position-sensitive detectors in APT.

Main Methods:

Utilizing the multi-hit capabilities of position-sensitive time-resolved detectors.
Implementing an innovative method based on Fourier space signal processing.
Applying advanced delay-line position-sensitive detectors for signal acquisition.

Main Results:

Drastic improvement in the time resolving power of the detector.
Enhanced capability to detect and properly position multiple ions (up to 30) per evaporation pulse.
Significant improvement in the quantization of chemical composition, particularly for highly-doped Si(B) samples.

Conclusions:

The developed Fourier space signal processing method effectively mitigates pile-up effects in APT.
This advancement significantly enhances the accuracy of chemical composition analysis in materials.
The method is particularly impactful for analyzing highly-doped semiconductor materials like Si(B).