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Updated: May 15, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
Note: radiofrequency scanning probe microscopy using vertically oriented cantilevers
1Department of Earth and Geo-Environmental Sciences, Alma Mater Studiorum - University of Bologna, Bologna 40126, Italy. giovanni.valdre@unibo.it
Abstract:
We present a simple method, based on the modification of a widespread atomic force microscope, that allows the simultaneous acquisition of the sample topography and RF spectra at the nanoscale minimizing the parasitic capacitance of the cantilever. We used a microcantilever set with its long axis perpendicular to the specimen surface and connected to a vector network analyzer (RF range 100 kHz-8.5 GHz) to measure RF impedance signal variations at the cantilever apex-sample interface. The RF impedance signal was found highly sensitive to very short probe-to-sample distances (<50 nm) and to material properties at the interface.
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