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Updated: May 15, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Properties of acoustic plate modes in YZ LiNbO₃
Waldemar Soluch1, Magdalena Lysakowska
1Institute of Electronic Materials Technology, Warsaw, Poland. waldemar.soluch@itme.edu.pl
Abstract:
Properties of acoustic plate modes (APMs) in YZ LiNbO₃ were calculated and measured. It was found that these modes have a dominant longitudinal component of mechanical motion concentrated near both surfaces of a plate. A delay line with double-electrode interdigital transducers (IDTs) was used for the measurements. Because of good matching to the load, strong triple-transit signals (TTS) were generated and insertion loss of about 7 dB was achieved at a frequency of about 131.4 MHz. Using water and glycerin solutions, insertion loss changes against viscosity were measured for this mode. In a viscosity range from about 1 mPa·s to 1000 mPa·s, an insertion loss change of about 16 dB was obtained. High sensitivity of viscosity measurement over a wide range makes the APMs in YZ LiNbO₃ attractive for application in viscosity sensors.
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