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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Digital holographic three-dimensional imaging spectrometry

Sirawit Teeranutranont1, Kyu Yoshimori

  • 1Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Iwate University, Ueda 4-3-5, Morioka, Iwate 020-8551, Japan. sirawit@ql.cis.iwate‐u.ac.jp

Applied Optics
|January 8, 2013
PubMed

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