Ultrasonic geometrical characterization of periodically corrugated surfaces

Accurate characterization of the characteristic dimensions of a periodically corrugated surface using ultrasonic imaging technique is investigated both theoretically and experimentally. The possibility of accurately characterizing the characteristic dimensions is discussed. The condition for accurate characterization and the quantitative relationship between the accuracy and its determining parameters are given. The strategies to avoid diffraction effects instigated by the periodical nature of a corrugated surface are also discussed. Major causes of erroneous measurements are theoretically discussed and experimentally illustrated. A comparison is made between the presented results and the optical measurements, revealing acceptable agreement. This work realistically exposes the capability of the proposed ultrasonic technique to accurately characterize the lateral and vertical characteristic dimensions of corrugated surfaces. Both the general principles developed theoretically as well as the proposed practical techniques may serve as useful guidelines to peers.