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Monolithic composite “pressure + acceleration + temperature + infrared” sensor using a versatile single-sided
1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China. nizao@mail.sim.ac.cn
Sensors (Basel, Switzerland)
|January 18, 2013
Summary
We developed a low-cost fabrication process for a novel composite sensor integrating pressure, acceleration, temperature, and infrared detection. This enables scalable, multifunctional sensing network nodes.
Area of Science:
- Materials Science
- Microelectromechanical Systems (MEMS)
- Sensor Technology
Background:
- Developing integrated sensors for sensing network nodes is crucial for efficient data collection.
- Existing monolithic integration methods often face challenges with cost and multifunctionality.
Purpose of the Study:
- To report a new design and fabrication module for low-cost, monolithic integration of composite sensors.
- To demonstrate the first "pressure + acceleration + temperature + infrared" (PATIR) composite sensor.
Main Methods:
- Utilized a single-sided "low-stress-silicon-nitride (LS-SiN)/polysilicon (poly-Si)/Al" process.
- Employed front-side surface/bulk-micromachining on a conventional Si-substrate.
- Developed systematic theoretical design and analysis methods.
Main Results:
- Demonstrated a 2.5 mm × 2.5 mm PATIR composite sensor.
- Achieved a piezoresistive absolute-pressure sensor (up to 700 kPa).
- Integrated a piezoresistive accelerometer (±10 g), thermoelectric infrared detector, and thermistor (-25-120 °C).
Conclusions:
- The developed module enables a low-cost, monolithically-integrated "multifunctional-library" technique.
- This approach is suitable for customizable, application-specific requirements.
- Facilitates the development of small-size, low-cost, large-scale sensing network nodes.
