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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
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The effect of variation in phased array element performance for Non-Destructive Evaluation (NDE).

David Duxbury1, Jonathan Russell, Michael Lowe

  • 1Rolls-Royce Nuclear, PO Box 2000, Derby DE21 7XX, UK. david.duxbury04@imperial.ac.uk

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Phased array element variations significantly impact ultrasonic beam quality, causing artifacts like broadening and side lobes. New Non-Destructive Evaluation (NDE) calibration methods require specific element performance limits to ensure reliable inspection data.

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Area of Science:

  • Ultrasonic testing
  • Non-Destructive Evaluation (NDE)
  • Phased Array Systems

Background:

  • Traditional Non-Destructive Evaluation (NDE) calibration focuses on beam integrity, which is problematic for advanced techniques like Full Matrix Capture (FMC).
  • Component inspections using FMC require a calibration routine decoupled from specific beam formations.

Purpose of the Study:

  • To investigate the impact of phased array element performance variations (sensitivity, phase, non-functioning elements) on ultrasonic beam integrity.
  • To establish element performance specifications for a new NDE calibration method focusing on probe integrity rather than beam integrity.

Main Methods:

  • Utilized an array beam model based on Huygens' principle to simulate the effects of individual element variations.
  • Employed Monte Carlo simulation to independently assess the influence of element sensitivity, phase, and non-functioning elements.
  • Simulations were conducted at various center frequencies to derive practical specifications.

Main Results:

  • Variations in element performance primarily introduce beam artifacts, including main beam broadening, increased noise floor, and enlarged side lobes.
  • Proposed specifications for element sensitivity (within 50% of mean), element phase error (product with bandwidth < 0.051 for focused, < 0.035 for plane beams), and non-functioning elements (max 9%).
  • A minimum amplitude difference of 8 dB between beam artifacts and the main beam peak is suggested.

Conclusions:

  • Element performance directly influences ultrasonic beam quality and the reliability of NDE data.
  • The proposed element performance specifications enable a new probe-integrity-focused calibration method suitable for FMC inspections.
  • Adherence to these specifications ensures beam quality without requiring beam-forming during calibration.