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Updated: May 14, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Design of a novel MEMS gyroscope array.

Wei Wang¹, Xiaoyong Lv, Feng Sun

¹College of Automation, Harbin Engineering University, No. 145 Nantong Street, Harbin 150001, Heilongjiang, China. chinaww2006@yahoo.com.cn

Sensors (Basel, Switzerland)

|January 30, 2013

Summary

This summary is machine-generated.

Researchers developed a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope and array. This MEMS gyroscope array enhances sensitivity and offers a robust 100 Hz system bandwidth for practical applications.

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Last Updated: May 14, 2026

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Published on: October 1, 2007

Area of Science:

* Engineering
* Microelectromechanical Systems (MEMS)

Background:

* MEMS vibratory gyroscopes are crucial for inertial sensing.
* Existing designs often face limitations in sensitivity and robustness.

Purpose of the Study:

* To introduce a novel four degree-of-freedom (DOF) MEMS vibratory gyroscope.
* To present a MEMS gyroscope array utilizing the novel unit for enhanced performance.

Main Methods:

* Design of a 4-DOF MEMS gyroscope with integrated drive-mode elements and surrounding sense-mode elements.
* Utilization of a complete 2-DOF vibratory structure for both drive and sense modes.
* Formation of a gyroscope array by combining multiple units through their sense modes and a unique detection mass.

Main Results:

* The gyroscope array (n=6) demonstrated an 8 dB increase in sense-mode gain compared to a single unit.
* Achieved a 3 dB bandwidth of 100 Hz in sense-mode and 190 Hz in drive-mode.
* The system achieved a matched bandwidth of 100 Hz, suitable for practical applications.

Conclusions:

* The novel 4-DOF MEMS gyroscope design offers inherent robustness and desired bandwidth.
* The MEMS gyroscope array significantly improves sensitivity and gain.
* The developed system meets practical application requirements for inertial sensing.