Reduction of electron channeling in EDS using precession
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Updated: May 14, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Yifeng Liao1, Laurence D Marks
1Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA. Yifeng.Liao@gmail.com
Abstract:
We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO3 specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54 mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L21-ordered Fe2MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.
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