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Updated: May 14, 2026
Encapsulation and Permeability Characteristics of Plasma Polymerized Hollow Particles
Published on: August 16, 2012
Transparent conductive gas-permeation barriers on plastics by atomic layer deposition
Chun-Ting Chou1, Pei-Wei Yu, Ming-Hung Tseng
1Department of Materials Science and Engineering, National Taiwan University, Taipei 106, Taiwan.
Abstract:
A mixed-deposition atomic layer deposition process produces Hf:ZnO films with uniform dopant distribution and high electrical conductivity (resistivity = 4.5 × 10(-4) W cm), optical transparency (>85% from 400-1800 nm), and moisture-barrier property (water vapor transmission rate = 6.3 × 10(-6) g m(-2) day(-1)).
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