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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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Portable atomic layer deposition reactor for in situ synchrotron photoemission studies

R Methaapanon1, S M Geyer, C Hagglund

  • 1Department of Chemical Engineering, Stanford University, Stanford, California 94305, USA.

The Review of Scientific Instruments
|February 8, 2013
PubMed

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