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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
S Flewett1, C M Günther, C von Korff Schmising
1Institut für Optik und Atomare Physik, Technische Universität Berlin, Strasse des 17 Juni 135, 10623 Berlin,Germany. samuel.flewett@psi.ch
Fourier transform holography (FTH) achieves nanometer resolution X-ray imaging. This study omits the need for large sample-detector distances in FTH, enhancing photon efficiency and preventing phase retrieval issues.
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