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Updated: May 14, 2026

Theoretical Calculation and Experimental Verification for Dislocation Reduction in Germanium Epitaxial Layers with Semicylindrical Voids on Silicon
Published on: July 17, 2020
A critically coupled Germanium photodetector under vertical illumination
Tsung-Ting Wu1, Ching-Yang Chou, Ming-Chang M Lee
1Institute of Photonics Technologies, National Tsing-Hua University, Hsinchu, Taiwan.
We designed a Germanium photodetector on Silicon-on-insulator for vertical illumination. This device achieves high efficiency and bandwidth, offering a cost-effective solution for silicon photonics optical interconnects.
Area of Science:
- Photonics
- Optoelectronics
- Materials Science
Background:
- Silicon photonics is crucial for optical interconnects.
- Efficient photodetectors are needed for high-speed optical receivers.
- Germanium-on-silicon integration faces challenges in performance and compatibility.
Purpose of the Study:
- To propose and study a practical Germanium photodetector design.
- To achieve critical coupling under vertical illumination at 1310 nm.
- To develop a high-performance, cost-effective solution for silicon photonics.
Main Methods:
- Device design and simulation of a Germanium photodetector on a Silicon-on-insulator substrate.
- Optimization of parameters to achieve critical coupling.
- Analysis of efficiency-bandwidth product and spectral width under realistic constraints.
Main Results:
- Achieved critical coupling under vertical illumination at 1310 nm.
- Obtained a high efficiency-bandwidth product exceeding 50 GHz.
- Reached a 3dB spectral full width of approximately 30 nm.
- Demonstrated compatibility with CMOS process technology.
Conclusions:
- The proposed Germanium photodetector design is practical and high-performance.
- The device offers a promising solution for optical receivers in silicon photonics.
- CMOS compatibility ensures potential for low-cost, mass production.
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