Mid-infrared photonic crystal waveguides in silicon

We demonstrate the design, fabrication and characterization of mid-infrared photonic crystal waveguides on a silicon-on-insulator platform, showing guided modes in the wavelength regime between 2.9 and 3.9 µm. The characterization is performed with a proprietary intra-cavity Optical Parametric Oscillator in a free space optical setup and with a fibre coupled setup using a commercial Quantum Cascade Laser. We discuss the use of an integrated Mach-Zehnder interferometer for dispersion measurements and report a measured group velocity of up to a value of n(g) = 12, and determine the propagation loss to be 20 dB/cm.