Updated: May 13, 2026

Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers
Published on: February 8, 2022
Boya Radha1, Su Hui Lim, Mohammad S M Saifullah
1Chemistry and Physics of Materials Unit and DST Unit on Nanoscience, Jawaharlal Nehru Centre for Advanced Scientific Research, Jakkur P.O., Bangalore 560 064, India.
This study introduces a novel nanoimprint lithography method for creating 3D hierarchical metal patterns. This technique offers a simpler approach for applications in photonics and electronics.
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