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Updated: May 13, 2026

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Fabrication and Characterization of Superconducting Resonators
Published on: May 21, 2016
Superconducting microstrip resonator for pulsed ESR of thin films
O W B Benningshof1, H R Mohebbi, I A J Taminiau
1Institute for Quantum Computing, Waterloo, ON, Canada. obenning@uwaterloo.ca
Journal of Magnetic Resonance (San Diego, Calif. : 1997)
|March 5, 2013
Abstract:
This article describes a superconducting microstrip resonator operating at 9.5 GHz (X-band) that is specially designed for pulsed ESR on thin films. A novel configuration consisting of an array of half-wave length microstrip transmission lines generates a uniform magnetic field over a 2-D region of 100×1000 μm(2) with field homogeneity better than 5×10(-2). Using the device, we demonstrate strong coupling of the resonator to an electron spin ensemble and pulsed ESR on Si:P.

