Updated: May 13, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
Published on: September 14, 2018
Maria Gandman1, Yaron Kauffmann, Christoph T Koch
1Department of Materials Science and Engineering, Technion-Israel Institute of Technology, Haifa 32000, Israel.
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