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A dual lateral-field-excited bulk acoustic wave sensor array.

Shane Winters¹, George Bernhardt, John F Vetelino

¹Laboratory for Surface Science and Technology, University of Maine, Orono, ME, USA.

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

|March 12, 2013

Summary

This study introduces a novel lateral-field-excited (LFE) sensor array for enhanced detection. LFE sensors offer a bare sensing surface, enabling simultaneous measurement of electrical and mechanical property changes with minimal interference.

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Area of Science:

Materials Science
Electrical Engineering
Sensor Technology

Background:

Traditional quartz crystal microbalances (QCMs) face limitations in sensor array fabrication due to surface electrodes and wiring.
QCMs are unable to detect changes in electrical properties, hindering their application in certain sensing scenarios.
A novel sensor design is needed to overcome these limitations for advanced sensor arrays.

Purpose of the Study:

To fabricate and test two independent lateral-field-excited (LFE) sensor elements on a single substrate.
To demonstrate the feasibility of LFE sensors for creating compact and versatile sensor arrays.
To evaluate the sensing capabilities of LFE devices for both electrical and mechanical property changes.

Main Methods:

Fabrication of two distinct lateral-field-excited (LFE) sensor elements integrated onto a single substrate.

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Utilizing a back-side electrode configuration, preserving a bare sensing surface on each LFE element.

Testing the response of individual LFE elements to various stimuli to assess sensing capabilities and crosstalk.

Main Results:

Successful fabrication of two independent LFE sensor elements on a shared substrate.
Demonstrated that individual LFE elements respond to both electrical and mechanical property variations.
Observed minimal crosstalk between the two independent LFE sensor elements, indicating good signal isolation.

Conclusions:

Lateral-field-excited (LFE) sensors offer a promising alternative to QCMs for sensor array applications.
The LFE sensor's design facilitates integration and enables the detection of diverse property changes.
This work validates the potential of LFE sensor arrays for multi-modal sensing with high performance.