Related Experiment Video
Updated: May 13, 2026

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
Published on: April 29, 2020
Pulsed ion beam measurement of defect diffusion lengths in irradiated solids
S Charnvanichborikarn1, M T Myers, L Shao
1Lawrence Livermore National Laboratory, Livermore, CA 94550, USA. charnvanichb1@llnl.gov
Abstract:
Radiation-generated point defects in solids often experience dynamic annealing-diffusion and interaction processes after the thermalization of collision cascades. The length scale of dynamic annealing can be described in terms of the characteristic defect diffusion length (Ld). Here, we propose to measure Ld by a pulsed beam method. Our approach is based on the observation of enhanced defect production when, for individual ion pulses, the average separation between adjacent damage regions is smaller than Ld. We obtain a value for Ld of ~30 nm for float-zone Si crystals bombarded at room temperature with 500 keV Ar ions.
