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Terahertz surface plasmon polaritons on a semiconductor surface structured with periodic V-grooves
Shanshan Li1, Mohammad M Jadidi, Thomas E Murphy
1Department of Electrical & Computer Engineering University of Maryland, College Park, MD 20742, USA.
Optics Express
|April 3, 2013
Summary
Researchers created terahertz waveguides on silicon surfaces using V-grooves. These plasmonic waveguides confine terahertz waves, offering a novel method for semiconductor-based terahertz technology.
Area of Science:
- Physics
- Materials Science
- Electrical Engineering
Background:
- Terahertz (THz) wave propagation is crucial for advanced spectroscopy and imaging.
- Existing THz waveguides often rely on complex fabrication methods or metallic components.
- Semiconductor surfaces offer potential for integrated THz devices.
Purpose of the Study:
- To demonstrate THz wave propagation confined to a semiconductor surface.
- To explore the use of V-shaped grooves for creating plasmonic waveguides.
- To investigate the relationship between groove geometry and wave confinement.
Main Methods:
- Fabrication of a 1D array of V-grooves on a highly-doped silicon surface using anisotropic wet-etching.
- Characterization of THz wave propagation using terahertz time-domain spectroscopy (THz-TDS).
- Numerical simulations to complement experimental measurements.
Main Results:
- Observation of resonant modes confined near the corrugated semiconductor surface.
- Demonstration that groove pitch and depth influence wave confinement and resonant frequency.
- Confirmation of surface modes through both simulation and experiment.
Conclusions:
- V-groove geometry provides a novel structure for supporting surface waves.
- This method enables practical fabrication of THz waveguides directly on semiconductor surfaces.
- Offers an alternative to complex fabrication techniques like reactive-ion etching or electroplating.

