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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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Impedance of DC-bias-controlled composite FBARs

Spartak Gevorgian1, Andrei Vorobiev

  • 1Department of Microtechnology and Nanoscience, Chalmers University of Technology, Gothenburg, Sweden. spartak.gevorgian@chalmers.se

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
|April 4, 2013
PubMed

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