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Printed sub-100 nm polymer-derived ceramic structures.

Binh Duong¹, Palash Gangopadhyay, Josh Brent

¹NanoScience Technology Center, University of Central Florida, Orlando, Florida 32826, United States.

ACS Applied Materials & Interfaces

|April 11, 2013

Summary

We developed spin-on nanoprinting (SNAP) to create nanoscale patterns from preceramic polymers. This inexpensive technique offers a versatile method for fabricating high-performance ceramic structures for demanding applications.

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Area of Science:

Materials Science
Nanotechnology
Ceramics Engineering

Background:

Developing cost-effective methods for nanoscale fabrication is crucial for advanced materials.
Preceramic polymers offer a route to ceramic structures but require efficient patterning techniques.

Purpose of the Study:

To introduce spin-on nanoprinting (SNAP) as a novel technique for fabricating sub-100 nm preceramic polymer patterns.
To demonstrate the versatility of SNAP for creating patterns on various substrates and for subsequent material conversion.

Main Methods:

Utilizing a spin-on nanoprinting (SNAP) process with a liquid preceramic polymer precursor.
Transferring sub-100 nm patterns from a mold onto flexible and rigid substrates.
Exploring the use of printed patterns as replicas for secondary printing and conversion to ceramic structures.

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Main Results:

Successfully generated and transferred sub-100 nm preceramic polymer patterns using SNAP.
Achieved high fidelity in pattern dimensions, closely replicating the mold's nanostructure.
Demonstrated the potential for creating multi-generational patterns and converting them into ceramic materials.

Conclusions:

Spin-on nanoprinting (SNAP) is an inexpensive, parallel fabrication method suitable for nanoscale patterning.
The technique enables the creation of ceramic structures for high-temperature and harsh environments.
SNAP requires no specialized equipment, making it accessible for broader applications.