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Updated: May 12, 2026

Fabrication of High Contrast Gratings for the Spectrum Splitting Dispersive Element in a Concentrated Photovoltaic System

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Published on: July 18, 2015

CMOS-compatible high efficiency double-etched apodized waveguide grating coupler.

Chao Li¹, Huijuan Zhang, Mingbin Yu

¹Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Science Park II, 117685 Singapore. lic@ime.a-star.edu.sg

|April 11, 2013

Summary

This summary is machine-generated.

We developed a highly efficient double-etched fiber-to-waveguide grating coupler using deep UV photolithography. This silicon-on-insulator device offers low coupling loss and a wide bandwidth, proving robust against fabrication variations.

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Area of Science:

Photonics and optical engineering
Integrated optics
Nanofabrication

Background:

Efficient fiber-to-waveguide coupling is crucial for integrated photonic circuits.
Existing couplers often face limitations in bandwidth, efficiency, or fabrication complexity.
Silicon-on-insulator (SOI) platforms offer advantages for photonic integration.

Purpose of the Study:

To design and fabricate a high-efficiency fiber-to-waveguide grating coupler.
To achieve low coupling loss and a wide operational bandwidth.
To demonstrate the robustness and fabrication tolerance of the proposed design.

Main Methods:

Utilized a double-etched apodized grating structure.
Employed deep ultraviolet (DUV) photolithography for fabrication on an SOI substrate.
Characterized the grating coupler's performance through optical measurements and simulations.

Main Results:

Achieved a low coupling loss of -1.5 dB at a wavelength of 1560 nm.
Obtained a 3-dB bandwidth of 54 nm, indicating broadband operation.
Simulations and measurements confirmed the design's robustness to fabrication variations.

Conclusions:

The double-etched apodized grating coupler is a high-performance solution for fiber-to-waveguide coupling.
The fabrication process using DUV photolithography is viable and yields reliable results.
The demonstrated robustness simplifies integration into complex photonic systems.