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Updated: May 12, 2026

14:52
Fabrication of Three-Dimensional Graphene-Based Polyhedrons via Origami-Like Self-Folding
Published on: September 23, 2018
Robust graphene membranes in a silicon carbide frame
Daniel Waldmann1, Benjamin Butz, Sebastian Bauer
1Lehrstuhl für Angewandte Physik, Universität Erlangen-Nürnberg, Germany.
ACS Nano
|April 17, 2013
Summary
We developed a new method to create suspended graphene membranes from silicon carbide. This process yields high-quality, robust graphene suitable for atomic-scale imaging and demanding applications.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Chemistry
Background:
- Freely suspended graphene membranes are crucial for advanced electronic and sensing devices.
- Existing fabrication methods often face challenges with scalability, yield, and membrane integrity.
Purpose of the Study:
- To develop a scalable and efficient fabrication process for suspended bi- and trilayer graphene membranes.
- To characterize the quality and robustness of the fabricated graphene membranes.
Main Methods:
- Photoelectrochemical etching of graphene grown on silicon carbide.
- Micro-Raman spectroscopy and atomic force microscopy for material characterization.
- High-resolution transmission electron microscopy (HRTEM) for structural analysis.
Main Results:
- Simultaneous fabrication of hundreds of arbitrarily shaped graphene membranes (up to 500 μm²) with ~90% yield.
- Graphene integrity maintained during etching; membranes are virtually unstrained.
- High cleanliness suitable for atomic-scale HRTEM; membranes exhibit excellent thermal and chemical robustness.
Conclusions:
- The photoelectrochemical etching process provides a reliable method for producing high-quality suspended graphene membranes.
- These membranes are robust and suitable for advanced characterization and applications requiring high purity and stability.

