Multichannel bandpass filters utilizing multilayer photonic crystal
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Updated: May 12, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Yasuo Ohtera1, Hirohito Yamada
1Graduate School of Engineering, Tohoku University, Sendai 980-8579 Japan. ohtera@ecei.tohoku.ac.jp
Abstract:
We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO(2) multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50~175 nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.
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