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Related Experiment Video

Updated: May 12, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Frequency-comb-referenced multi-wavelength profilometry for largely stepped surfaces.

Sangwon Hyun¹, Minah Choi, Byung Jae Chun

¹Ultrafast Optics for Ultraprecision Group, Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST),Science Town, Daejeon, 305-701, South Korea.

|April 24, 2013

Summary

This summary is machine-generated.

This study introduces a new multi-wavelength interferometry technique using a frequency comb laser for precise 3-D surface profiling. The method achieves sub-wavelength precision for measuring high step structures, crucial for industrial applications.

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Last Updated: May 12, 2026

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A Multimodal Wide-Field Fourier-Transform Raman Microscope

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Published on: December 30, 2025

Area of Science:

Metrology
Optical Engineering
Surface Science

Background:

Accurate 3-D surface profiling is essential for advanced manufacturing and calibration.
Traditional interferometry methods face limitations in measuring discontinuous surfaces with high step structures due to phase ambiguity.

Purpose of the Study:

To develop a novel multi-wavelength interferometry technique for precise 3-D surface profiling.
To overcome the phase ambiguity limitations in measuring discontinuous surfaces with high step structures.

Main Methods:

Utilizing four wavelengths generated by phase-locking to a frequency comb of an Er-doped fiber femtosecond laser.
Stabilizing the laser to a Rubidium (Rb) atomic clock for enhanced accuracy.
Implementing frequency-comb-referenced multi-wavelength interferometry.

Main Results:

Extended the phase non-ambiguity range by a factor of 64,500.
Maintained sub-wavelength measurement precision.
Achieved a repeatability of 3.13 nm (one-sigma) for measuring step heights of 1800, 500, and 70 μm.

Conclusions:

The developed method provides accurate and precise 3-D surface profiling of discontinuous surfaces with high step structures.
The technique is suitable for standard calibration of gauge blocks and industrial inspection of microelectronics.