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Pd-based integrated optical hydrogen sensor on a silicon-on-insulator platform.

M Z Alam¹, Nicholas Carriere, Farshid Bahrami

¹Edward S. Rogers Sr. Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, Canada.

|May 2, 2013

Summary

We developed a compact optical hydrogen sensor using silicon waveguides and palladium. This integrated device shows potential for detecting multiple gases and environmental factors.

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Area of Science:

Optoelectronics
Materials Science
Chemical Sensing

Background:

Integrated optical sensors offer miniaturization and high sensitivity for gas detection.
Silicon-on-insulator (SOI) platforms provide a robust base for photonic devices.

Purpose of the Study:

To demonstrate a compact, integrated optical hydrogen sensor.
To evaluate the sensor's performance for hydrogen detection.
To explore its potential for multi-gas sensing applications.

Main Methods:

Fabrication of a silicon waveguide coated with a palladium thin film on an SOI platform.
Experimental testing of the sensor's sensitivity and response time.
Exposure to volumetric hydrogen concentrations from 0% to 4%.

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Main Results:

Successful demonstration of a compact, integrated optical hydrogen sensor.
Characterization of sensor sensitivity and response time across a range of hydrogen concentrations.
Observation of potential for simultaneous detection of multiple gases and environmental factors.

Conclusions:

The developed optical hydrogen sensor is a promising building block for advanced optical noses.
The integrated SOI platform enables compact and efficient gas sensing solutions.
Further development could lead to devices for simultaneous environmental monitoring.