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Related Experiment Video

Updated: May 11, 2026

A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens

A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens

Published on: June 2, 2017

Elevated temperature, nano-mechanical testing in situ in the scanning electron microscope.

J M Wheeler¹, J Michler

¹EMPA-Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Thun, Switzerland. Jeffrey.Wheeler@empa.ch

The Review of Scientific Instruments

|May 3, 2013

Summary

A new nano-mechanical testing platform enables in situ scanning electron microscopy (SEM) testing at variable temperatures and strain rates. This system allows direct observation of material transitions, such as the brittle-to-ductile shift in silicon.

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Last Updated: May 11, 2026

A Novel Method for In Situ Electromechanical Characterization of Nanoscale Specimens

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Published on: June 2, 2017

A Virtual Simulation Experiment of Mechanics: Material Deformation and Failure Based on Scanning Electron Microscopy

A Virtual Simulation Experiment of Mechanics: Material Deformation and Failure Based on Scanning Electron Microscopy

Published on: January 20, 2023

Area of Science:

Materials Science
Nanotechnology
Mechanical Engineering

Background:

In situ mechanical testing within a scanning electron microscope (SEM) requires precise control over temperature and strain rate.
Accurate temperature monitoring and control are crucial for preventing thermal drift and ensuring reliable nano-mechanical measurements at elevated temperatures.

Purpose of the Study:

To develop and characterize a versatile nano-mechanical testing platform for in situ SEM experiments.
To enable variable temperature and variable strain rate testing across various test geometries.
To investigate material behavior under thermomechanical loading conditions.

Main Methods:

Development of a displacement-controlled nano-mechanical test platform integrated with an SEM.
Implementation of independent heating and temperature monitoring for both indenter tip and sample.
Utilizing focused ion beam (FIB) machining for sample preparation and various test geometries (indentation, micro-compression, bending, scratch).
Calibration of indenter tip apex temperature for use as a surface temperature probe.

Main Results:

The system demonstrated stable, elevated temperature testing up to 500 °C, achieving thermal equilibrium between indenter and sample.
Direct observation of a brittle-to-ductile transition in [100] silicon micro-pillars, showing fracture, splitting, and plastic deformation as temperature increased.
Validation of the platform through nanoindentation of fused silica and micro-compression of silicon.

Conclusions:

The developed platform offers a robust solution for in situ thermomechanical testing in SEM.
Independent temperature control and indenter calibration are essential for accurate high-temperature nano-mechanical measurements.
The system facilitates direct observation and characterization of temperature-dependent material deformation mechanisms.