A novel instrument for quantitative nanoanalytics involving complementary X-ray methodologies

Area of Science:

• Materials Science
• Nanotechnology
• Analytical Chemistry

Background:

• Advanced nanoanalysis requires sophisticated instrumentation for precise material characterization.
• Synchrotron radiation offers unique properties for high-resolution elemental and structural analysis.

Purpose of the Study:

• To construct and commission a novel ultra-high vacuum (UHV) instrument for X-ray reflectometry and spectrometry.
• To enable versatile nanoanalytical techniques using synchrotron radiation for comprehensive material probing.

Main Methods:

• Development of a UHV instrument featuring a 9-axis manipulator for independent sample alignment.
• Integration of movable photodiodes and an aperture system for flexible beam control.
• Utilization of energy-dispersive X-ray detectors for various analytical techniques.

Main Results:

• The instrument successfully enables reference-free X-ray fluorescence analysis (XRF), total-reflection XRF, and grazing-incidence XRF.
• Optional X-ray reflectometry and polarization-dependent X-ray absorption fine structure analyses are supported.
• Analysis of sample composition, layer thickness, depth profiles, and molecular orientation for nanostructures is demonstrated.

Conclusions:

• The newly developed UHV instrument provides a flexible and capable platform for advanced nanoanalysis.
• It facilitates a wide range of X-ray-based techniques for detailed characterization of materials at the nanoscale.
• The instrument's capabilities are validated through selected application examples.