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Updated: May 11, 2026

Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
Tobias Herffurth1, Sven Schröder, Marcus Trost
1Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Strasse 7, Jena 07745, Germany. tobias.herffurth@iof.fraunhofer.de
A new 3D scatter measurement system characterizes surfaces and nanostructures. It analyzes scattering origins and defects, comparing results with interferometry for comprehensive surface analysis.
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