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Updated: May 11, 2026

Micro/Nano-scale Strain Distribution Measurement from Sampling Moiré Fringes
Published on: May 23, 2017
Strain measurement at the nanoscale: Comparison between convergent beam electron diffraction, nano-beam electron
A Béché1, J L Rouvière, J P Barnes
1CEA-INAC/UJF-Grenoble UMR-E, SP2M, LEMMA, Minatec Grenoble F-38054, France. armand.beche@ua.ac.be
Abstract:
Convergent beam electron diffraction (CBED), nano-beam electron diffraction (NBED or NBD), high resolution imaging (HRTEM and HRSTEM) and dark field electron holography (DFEH or HoloDark) are five TEM based techniques able to quantitatively measure strain at the nanometer scale. In order to demonstrate the advantages and disadvantages of each technique, two samples composed of epitaxial silicon-germanium layers embedded in a silicon matrix have been investigated. The five techniques are then compared in terms of strain precision and accuracy, spatial resolution, field of view, mapping abilities and ease of performance and analysis.
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