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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
Achromatic elemental mapping beyond the nanoscale in the transmission electron microscope
K W Urban1, J Mayer, J R Jinschek
1Peter Grünberg Institute and Ernst Ruska Centre for Microscopy and Spectroscopy with Electrons, ER-C, Research Centre Jülich, D-52425 Jülich, Germany. k.urban@fz-juelich.de
Physical Review Letters
|May 21, 2013
Summary
Newly developed electron optics enable atomic-resolution energy-filtered transmission electron microscopy (EFTEM). This technique achieves 1.35 Å resolution for elemental mapping, crucial for nanoscale analysis when combined with theoretical calculations.
Area of Science:
- Materials Science
- Physics
- Chemistry
Background:
- Advancements in electron microscopy are crucial for nanoscale materials analysis.
- Energy-filtered transmission electron microscopy (EFTEM) offers elemental contrast but is limited by resolution.
- Achieving atomic resolution in EFTEM requires enhanced electron optics and energy filtering.
Purpose of the Study:
- To demonstrate atomic resolution in EFTEM using newly developed achromatic electron optics.
- To achieve elemental mapping beyond the nanoscale.
- To correlate experimental EFTEM data with theoretical calculations.
Main Methods:
- Utilized newly developed achromatic electron optics for transmission electron microscopy.
- Employed wide energy windows for energy filtering.
- Generated EFTEM images using silicon L(2,3) core-shell energy loss.
- Performed first-principles quantum mechanical calculations.
Main Results:
- Achieved a resolution of 1.35 Å in EFTEM.
- Successfully produced EFTEM images with atomic resolution.
- Demonstrated the feasibility of elemental mapping beyond the nanoscale.
- Established the necessity of theoretical calculations for interpreting physical information in EFTEM images.
Conclusions:
- Newly developed achromatic electron optics significantly enhance EFTEM capabilities.
- Atomic resolution EFTEM is now feasible, enabling nanoscale elemental mapping.
- Integration of experimental EFTEM with theoretical calculations is vital for understanding material properties at the atomic level.
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